Mixed-hybrid finite element methods for coupled problems in silicon dioxide technology
Sunday 5th January 2003
Causin, Paola; Sacco, Riccardo
In this work we deal with the numerical simulation of thermal oxidation in silicon device technology. This application is a complex coupled phenomen, involving the solution of a diffusion-reaction problem and of a fluid-structure interaction problem. Suitable iterative procedures are devised for handling nonlinearities and strong coupling between the sub-problems to be solved. In particular, we propose a unified dual-mixed hybrid formulation that allows for the simultaneous solution of the compressible/incompressible Navier equations in both solid and fluid domains. The accuracy and the flexibility of the proposed approach are demonstrated on benchmark test problems.