Publication Results



Code: MOX 5
Title: A Dual-Mixed Hybrid Formulation for Fluid Mechanics Problems: Mathematical Analysis and Application to Semiconductor Process Technology
Date: Saturday 1st June 2002
Author(s) : Causin, Paola; Sacco, Riccardo
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Abstract: In this paper we propose a dual-mixed hybrid formulation capable of treating uner a unified framework both compressible and incompressible problems in continuoum mechanics. A theoretical analysis of the method is carried out and optimal error estimates are derived for both mixed and hybrid variables. The potentialities of the novel approach are exploited in the computation of the stress field required in the simulation of the thermal oxidation process in semiconductor technology. The numerical formulation is validated both on model problems in continuoum mechanics and on a realistic example of the thermal oxidation process in a local oxidation structure (LOCOS)